Atomic layer deposition of SiO2 at room temperature using NH3-catalyzed sequential surface reactions Journal Article uri icon

Overview

publication date

  • February 20, 2000

Date in CU Experts

  • September 6, 2013 4:38 AM

Full Author List

  • Klaus JW; George SM

author count

  • 2

citation count

  • 111

Other Profiles

International Standard Serial Number (ISSN)

  • 0039-6028

Additional Document Info

start page

  • 81

end page

  • 90

volume

  • 447

issue

  • 1-3