Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates
Journal Article
Overview
publication date
- June 24, 2002
Full Author List
- Groner MD; Elam JW; Fabreguette FH; George SM
published in
- Thin Solid Films Journal
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 186
end page
- 197
volume
- 413
issue
- 1-2