Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates Journal Article uri icon

Overview

publication date

  • June 24, 2002

Full Author List

  • Groner MD; Elam JW; Fabreguette FH; George SM

Other Profiles

Additional Document Info

start page

  • 186

end page

  • 197

volume

  • 413

issue

  • 1-2