Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates Journal Article uri icon

Overview

publication date

  • June 24, 2002

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:38 AM

Full Author List

  • Groner MD; Elam JW; Fabreguette FH; George SM

author count

  • 4

citation count

  • 611

Other Profiles

International Standard Serial Number (ISSN)

  • 0040-6090

Additional Document Info

start page

  • 186

end page

  • 197

volume

  • 413

issue

  • 1-2

number

  • PII S0040-6090(02)00438-8