Al2O3 Atomic Layer Deposition with Trimethylaluminum and Ozone Studied by in Situ Transmission FTIR Spectroscopy and Quadrupole Mass Spectrometry Journal Article uri icon

Overview

publication date

  • December 11, 2008

Full Author List

  • Goldstein DN; McCormick JA; George SM

Other Profiles

Additional Document Info

start page

  • 19530

end page

  • 19539

volume

  • 112

issue

  • 49