Al2O3 Atomic Layer Deposition with Trimethylaluminum and Ozone Studied by in Situ Transmission FTIR Spectroscopy and Quadrupole Mass Spectrometry Journal Article uri icon

Overview

publication date

  • December 11, 2008

Date in CU Experts

  • September 6, 2013 4:38 AM

Full Author List

  • Goldstein DN; McCormick JA; George SM

author count

  • 3

citation count

  • 243

Other Profiles

International Standard Serial Number (ISSN)

  • 1932-7447

Electronic International Standard Serial Number (EISSN)

  • 1932-7455

Additional Document Info

start page

  • 19530

end page

  • 19539

volume

  • 112

issue

  • 49