Using a slit doser to probe gas dynamics during Al2O3 atomic layer deposition and to fabricate laterally graded Al2O3 layers Journal Article uri icon

Overview

publication date

  • March 31, 2011

Full Author List

  • Seghete D; Fabreguette FH; George SM

Other Profiles

Additional Document Info

start page

  • 3612

end page

  • 3618

volume

  • 519

issue

  • 11