Keynote lecture: Atomic layer deposition of Al2O3, ZnO and Al2O3/ZnO nanolaminates using sequential surface reactions in a viscous flow reactor. Journal Article uri icon

Overview

publication date

  • April 1, 2001

Full Author List

  • George SM; Elam JW; Groner MD

Additional Document Info

start page

  • U359

end page

  • U360

volume

  • 221