Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition Journal Article uri icon

Overview

publication date

  • August 1, 2002

Full Author List

  • Elam JW; Groner MD; George SM

Other Profiles

Additional Document Info

start page

  • 2981

end page

  • 2987

volume

  • 73

issue

  • 8