Critical tensile and compressive strains for cracking of Al₂O₃ films grown by atomic layer deposition Journal Article

Overview

CU Boulder Authors

George, Steven

publication date

April 15, 2011

has restriction

closed

Date in CU Experts

September 6, 2013 4:38 AM

Full Author List

Jen S-H; Bertrand JA; George SM

author count

3

citation count

169

published in

Journal of Applied Physics Journal

Other Profiles

International Standard Serial Number (ISSN)

0021-8979

Electronic International Standard Serial Number (EISSN)

1089-7550

Digital Object Identifier (DOI)

https://doi.org/10.1063/1.3567912

Additional Document Info

volume

109

issue

8

number

ARTN 084305