ADSORPTION AND DECOMPOSITION OF DIETHYLDIETHOXYSILANE ON SILICON SURFACES - NEW POSSIBILITIES FOR SIO2 DEPOSITION Journal Article uri icon

Overview

publication date

  • May 1, 1995

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • WISE ML; SNEH O; OKADA LA; GEORGE SM

author count

  • 4

citation count

  • 8

Other Profiles

International Standard Serial Number (ISSN)

  • 1071-1023

Additional Document Info

start page

  • 865

end page

  • 875

volume

  • 13

issue

  • 3