ADSORPTION AND DECOMPOSITION OF DIETHYLDIETHOXYSILANE ON SILICON SURFACES - NEW POSSIBILITIES FOR SIO2 DEPOSITION
Journal Article
Overview
publication date
- May 1, 1995
Full Author List
- WISE ML; SNEH O; OKADA LA; GEORGE SM
published in
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 865
end page
- 875
volume
- 13
issue
- 3