ADSORPTION AND DECOMPOSITION OF DIETHYLDIETHOXYSILANE ON SILICON SURFACES - NEW POSSIBILITIES FOR SIO2 DEPOSITION Journal Article

Overview

CU Boulder Authors

George, Steven

publication date

May 1, 1995

Full Author List

WISE ML; SNEH O; OKADA LA; GEORGE SM

published in

Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena : an official journal of the American Vacuum Society Journal

Other Profiles

Digital Object Identifier (DOI)

10.1116/1.588198

Additional Document Info

start page

865

end page

875

volume

13

issue

3