ADSORPTION AND DECOMPOSITION OF DIETHYLDIETHOXYSILANE ON SILICON SURFACES - NEW POSSIBILITIES FOR SIO2 DEPOSITION Journal Article uri icon

Overview

publication date

  • May 1, 1995

Full Author List

  • WISE ML; SNEH O; OKADA LA; GEORGE SM

Other Profiles

Additional Document Info

start page

  • 865

end page

  • 875

volume

  • 13

issue

  • 3