Atomic layer controlled growth of SiO2 films using binary reaction sequence chemistry Journal Article uri icon

Overview

publication date

  • March 3, 1997

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Klaus JW; Ott AW; Johnson JM; George SM

author count

  • 4

citation count

  • 90

Other Profiles

International Standard Serial Number (ISSN)

  • 0003-6951

Additional Document Info

start page

  • 1092

end page

  • 1094

volume

  • 70

issue

  • 9