Atomic layer controlled growth of SiO2 films using binary reaction sequence chemistry Journal Article uri icon

Overview

publication date

  • March 3, 1997

Full Author List

  • Klaus JW; Ott AW; Johnson JM; George SM

Other Profiles

Additional Document Info

start page

  • 1092

end page

  • 1094

volume

  • 70

issue

  • 9