Kinetics of the WF6 and Si2H6 surface reactions during tungsten atomic layer deposition Journal Article uri icon

Overview

publication date

  • May 20, 2001

Full Author List

  • Elam JW; Nelson CE; Grubbs RK; George SM

Other Profiles

Additional Document Info

start page

  • 121

end page

  • 135

volume

  • 479

issue

  • 1-3