Kinetics of the WF6 and Si2H6 surface reactions during tungsten atomic layer deposition Journal Article uri icon

Overview

publication date

  • May 20, 2001

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Elam JW; Nelson CE; Grubbs RK; George SM

author count

  • 4

citation count

  • 55

Other Profiles

International Standard Serial Number (ISSN)

  • 0039-6028

Electronic International Standard Serial Number (EISSN)

  • 1879-2758

Additional Document Info

start page

  • 121

end page

  • 135

volume

  • 479

issue

  • 1-3