ZrO2 film growth by chemical vapor deposition using zirconium tetra-tert-butoxide Journal Article
Overview
publication date
- July 6, 1999
has restriction
- closed
Date in CU Experts
- September 6, 2013 4:39 AM
Full Author List
- Cameron MA; George SM
author count
- 2
citation count
- 132
published in
- Thin Solid Films Journal
Other Profiles
International Standard Serial Number (ISSN)
- 0040-6090
Digital Object Identifier (DOI)
Additional Document Info
start page
- 90
end page
- 98
volume
- 348
issue
- 1-2