Nucleation and growth during tungsten atomic layer deposition on SiO2 surfaces Journal Article uri icon

Overview

publication date

  • May 1, 2001

Full Author List

  • Elam JW; Nelson CE; Grubbs RK; George SM

Other Profiles

Additional Document Info

start page

  • 41

end page

  • 52

volume

  • 386

issue

  • 1