Atomic-layer deposition of tungsten on oxide surfaces. Journal Article
Overview
publication date
- March 26, 2000
Date in CU Experts
- September 6, 2013 4:39 AM
Full Author List
- George SM; Klaus JW; Ferro SJ
author count
- 3
published in
Other Profiles
International Standard Serial Number (ISSN)
- 0065-7727
Additional Document Info
start page
- U557
end page
- U557
volume
- 219