Gas phase reaction products during tungsten atomic layer deposition using WF6 and Si2H6 Journal Article uri icon

Overview

publication date

  • July 1, 2004

Full Author List

  • Grubbs RK; Steinmetz NJ; George SM

Other Profiles

Additional Document Info

start page

  • 1811

end page

  • 1821

volume

  • 22

issue

  • 4