Gas phase reaction products during tungsten atomic layer deposition using WF6 and Si2H6 Journal Article uri icon

Overview

publication date

  • July 1, 2004

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Grubbs RK; Steinmetz NJ; George SM

author count

  • 3

citation count

  • 45

Other Profiles

International Standard Serial Number (ISSN)

  • 1071-1023

Additional Document Info

start page

  • 1811

end page

  • 1821

volume

  • 22

issue

  • 4