Molecular Layer Deposition of Titanicone Films using TiCl4 and Ethylene Glycol or Glycerol: Growth and Properties Journal Article uri icon

Overview

publication date

  • August 14, 2012

Full Author List

  • Abdulagatov AI; Hall RA; Sutherland JL; Lee BH; Cavanagh AS; George SM

Other Profiles

Additional Document Info

start page

  • 2854

end page

  • 2863

volume

  • 24

issue

  • 15