Gas diffusion ultrabarriers on polymer substrates using Al2O3 atomic layer deposition and SiN plasma-enhanced chemical vapor deposition Journal Article uri icon

Overview

publication date

  • July 15, 2009

has restriction

  • bronze

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Carcia PF; McLean RS; Groner MD; Dameron AA; George SM

author count

  • 5

citation count

  • 179

Other Profiles

International Standard Serial Number (ISSN)

  • 0021-8979

Electronic International Standard Serial Number (EISSN)

  • 1089-7550

Additional Document Info

volume

  • 106

issue

  • 2

number

  • ARTN 023533