Gas diffusion ultrabarriers on polymer substrates using Al2O3 atomic layer deposition and SiN plasma-enhanced chemical vapor deposition Journal Article uri icon

Overview

publication date

  • July 15, 2009

Full Author List

  • Carcia PF; McLean RS; Groner MD; Dameron AA; George SM

Other Profiles

Additional Document Info

volume

  • 106

issue

  • 2