Al(2)O(3) thin film growth on Si (100) using binary reaction sequence chemistry (vol 292, pg 135, 1997) Journal Article uri icon

Overview

publication date

  • August 31, 2009

Full Author List

  • Ott AW; Klaus JW; Johnson JM; George SM

Other Profiles

Additional Document Info

start page

  • 5950

end page

  • 5950

volume

  • 517

issue

  • 20