Al(2)O(3) thin film growth on Si (100) using binary reaction sequence chemistry (vol 292, pg 135, 1997) Journal Article uri icon

Overview

publication date

  • August 31, 2009

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Ott AW; Klaus JW; Johnson JM; George SM

author count

  • 4

citation count

  • 2

Other Profiles

International Standard Serial Number (ISSN)

  • 0040-6090

Additional Document Info

start page

  • 5950

end page

  • 5950

volume

  • 517

issue

  • 20