ZnO/Al2O3 nanolaminates fabricated by atomic layer deposition:: growth and surface roughness measurements Journal Article uri icon

Overview

publication date

  • July 1, 2002

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Elam JW; Sechrist ZA; George SM

author count

  • 3

citation count

  • 234

Other Profiles

International Standard Serial Number (ISSN)

  • 0040-6090

Additional Document Info

start page

  • 43

end page

  • 55

volume

  • 414

issue

  • 1

number

  • PII S0040-6090(02)00427-3