ZnO/Al2O3 nanolaminates fabricated by atomic layer deposition: growth and surface roughness measurements Journal Article uri icon

Overview

publication date

  • July 1, 2002

Full Author List

  • Elam JW; Sechrist ZA; George SM

Other Profiles

Additional Document Info

start page

  • 43

end page

  • 55

volume

  • 414

issue

  • 1