Nucleation and growth during the atomic layer deposition of W on Al2O3 and Al2O3 on W Journal Article uri icon

Overview

publication date

  • November 22, 2004

Full Author List

  • Grubbs RK; Nelson CE; Steinmetz NJ; George SM

Other Profiles

Additional Document Info

start page

  • 16

end page

  • 27

volume

  • 467

issue

  • 1-2