Atomic layer controlled growth of SiO2 films using self-limiting surface chemistry.
Journal Article
Overview
publication date
- April 13, 1997
Date in CU Experts
- September 6, 2013 4:39 AM
Full Author List
- Klaus JW; Ott AW; Johnson JM; George SM
author count
- 4
published in
Other Profiles
International Standard Serial Number (ISSN)
- 0065-7727
Additional Document Info
start page
- 181
end page
- PHYS
volume
- 213