Enhancing the nucleation of palladium atomic layer deposition on Al2O3 using trimethylaluminum to prevent surface poisoning by reaction products
Journal Article
Overview
publication date
- October 5, 2009
has restriction
- closed
Date in CU Experts
- September 6, 2013 4:39 AM
Full Author List
- Goldstein DN; George SM
author count
- 2
citation count
- 49
published in
- Applied Physics Letters Journal
Other Profiles
International Standard Serial Number (ISSN)
- 0003-6951
Digital Object Identifier (DOI)
Additional Document Info
volume
- 95
issue
- 14
number
- ARTN 143106