FTIR STUDIES OF TRICHLOROGERMANE AND TRICHLOROSILANE DECOMPOSITION ON SILICON SURFACES Journal Article uri icon

Overview

publication date

  • March 28, 1993

Full Author List

  • DILLON AC; WISE ML; ROBINSON MB; GEORGE SM

Additional Document Info

start page

  • 282

end page

  • COLL

volume

  • 205