Critical tensile strain and water vapor transmission rate for nanolaminate films grown using Al2O3 atomic layer deposition and alucone molecular layer deposition Journal Article uri icon

Overview

publication date

  • December 3, 2012

Full Author List

  • Jen S-H; Lee BH; George SM; McLean RS; Carcia PF

Other Profiles

Additional Document Info

volume

  • 101

issue

  • 23