Rapid SiO2 Atomic Layer Deposition Using Tris(tert-pentoxy)silanol Journal Article uri icon

Overview

publication date

  • November 25, 2008

Full Author List

  • Burton BB; Boleslawski MP; Desombre AT; George SM

Other Profiles

Additional Document Info

start page

  • 7031

end page

  • 7043

volume

  • 20

issue

  • 22