Rapid SiO2 Atomic Layer Deposition Using Tris(tert-pentoxy)silanol Journal Article uri icon

Overview

publication date

  • November 25, 2008

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Burton BB; Boleslawski MP; Desombre AT; George SM

author count

  • 4

citation count

  • 49

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Electronic International Standard Serial Number (EISSN)

  • 1520-5002

Additional Document Info

start page

  • 7031

end page

  • 7043

volume

  • 20

issue

  • 22