Atomic layer deposition of SiO2 using catalyzed and uncatalyzed self-limiting surface reactions Journal Article uri icon

Overview

publication date

  • June 1, 1999

Full Author List

  • Klaus JW; Sneh O; Ott AW; George SM

Other Profiles

Additional Document Info

start page

  • 435

end page

  • 448

volume

  • 6

issue

  • 3-4