Atomic layer controlled growth of Si3N4 films using sequential surface reactions Journal Article uri icon

Overview

publication date

  • November 27, 1998

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Klaus JW; Ott AW; Dillon AC; George SM

author count

  • 4

citation count

  • 83

Other Profiles

International Standard Serial Number (ISSN)

  • 0039-6028

Additional Document Info

start page

  • L14

end page

  • L19

volume

  • 418

issue

  • 1