Tantalum nitride atomic layer deposition using (tert-butylimido) tris(diethylamido) tantalum and hydrazine Journal Article uri icon

Overview

publication date

  • January 1, 2008

Full Author List

  • Burton BB; Lavoie AR; George SM

Other Profiles

Additional Document Info

start page

  • D508

end page

  • D516

volume

  • 155

issue

  • 7