SiO2 Atomic Layer Deposition Using Tris(dimethylamino)silane and Hydrogen Peroxide Studied by in Situ Transmission FTIR Spectroscopy Journal Article uri icon

Overview

publication date

  • May 14, 2009

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Burton BB; Kang SW; Rhee SW; George SM

author count

  • 4

citation count

  • 131

Other Profiles

International Standard Serial Number (ISSN)

  • 1932-7447

Electronic International Standard Serial Number (EISSN)

  • 1932-7455

Additional Document Info

start page

  • 8249

end page

  • 8257

volume

  • 113

issue

  • 19