SiO2 Atomic Layer Deposition Using Tris(dimethylamino)silane and Hydrogen Peroxide Studied by in Situ Transmission FTIR Spectroscopy Journal Article uri icon

Overview

publication date

  • May 14, 2009

Full Author List

  • Burton BB; Kang SW; Rhee SW; George SM

Other Profiles

Additional Document Info

start page

  • 8249

end page

  • 8257

volume

  • 113

issue

  • 19