SURFACE-CHEMISTRY OF AL2O3 DEPOSITION USING AL(CH3)(3) AND H2O IN A BINARY REACTION SEQUENCE Journal Article uri icon

Overview

publication date

  • January 1, 1995

Full Author List

  • DILLON AC; OTT AW; WAY JD; GEORGE SM

Other Profiles

Additional Document Info

start page

  • 230

end page

  • 242

volume

  • 322

issue

  • 1-3