Atomic Layer Deposition of MgO Using Bis(ethylcyclopentadienyl)magnesium and H2O Journal Article uri icon

Overview

publication date

  • February 5, 2009

Full Author List

  • Burton BB; Goldstein DN; George SM

Other Profiles

Additional Document Info

start page

  • 1939

end page

  • 1946

volume

  • 113

issue

  • 5