In situ resistivity measurements during the atomic layer deposition of ZnO and W thin films Journal Article uri icon

Overview

publication date

  • July 1, 2002

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Schuisky M; Elam JW; George SM

author count

  • 3

citation count

  • 56

Other Profiles

International Standard Serial Number (ISSN)

  • 0003-6951

Additional Document Info

start page

  • 180

end page

  • 182

volume

  • 81

issue

  • 1