In situ resistivity measurements during the atomic layer deposition of ZnO and W thin films Journal Article uri icon

Overview

publication date

  • July 1, 2002

Full Author List

  • Schuisky M; Elam JW; George SM

Other Profiles

Additional Document Info

start page

  • 180

end page

  • 182

volume

  • 81

issue

  • 1