Atomic layer deposition of MnO using Bis(ethylcyclopentadienyl) manganese and H2O Journal Article uri icon

Overview

publication date

  • August 3, 2009

Full Author List

  • Burton BB; Fabreguette FH; George SM

Other Profiles

Additional Document Info

start page

  • 5658

end page

  • 5665

volume

  • 517

issue

  • 19