Atomic layer deposition of MnO using Bis(ethylcyclopentadienyl) manganese and H2O Journal Article uri icon

Overview

publication date

  • August 3, 2009

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Burton BB; Fabreguette FH; George SM

author count

  • 3

citation count

  • 59

Other Profiles

International Standard Serial Number (ISSN)

  • 0040-6090

Electronic International Standard Serial Number (EISSN)

  • 1879-2731

Additional Document Info

start page

  • 5658

end page

  • 5665

volume

  • 517

issue

  • 19