Optimization and structural characterization of W/Al2O3 nanolaminates grown using atomic layer deposition techniques Journal Article uri icon

Overview

publication date

  • June 28, 2005

Full Author List

  • Sechrist ZA; Fabreguette FH; Heintz O; Phung TM; Johnson DC; George SM

Other Profiles

Additional Document Info

start page

  • 3475

end page

  • 3485

volume

  • 17

issue

  • 13