Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O-2 plasma Journal Article uri icon

Overview

publication date

  • April 15, 2011

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Baker L; Cavanagh AS; Seghete D; George SM; Mackus AJM; Kessels WMM; Liu ZY; Wagner FT

author count

  • 8

citation count

  • 86

Other Profiles

International Standard Serial Number (ISSN)

  • 0021-8979

Electronic International Standard Serial Number (EISSN)

  • 1089-7550

Additional Document Info

volume

  • 109

issue

  • 8

number

  • ARTN 084333