Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O-2 plasma Journal Article uri icon

Overview

publication date

  • April 15, 2011

Full Author List

  • Baker L; Cavanagh AS; Seghete D; George SM; Mackus AJM; Kessels WMM; Liu ZY; Wagner FT

Other Profiles

Additional Document Info

volume

  • 109

issue

  • 8