Surface poisoning in the nucleation and growth of palladium atomic layer deposition with Pd(hfac)(2) and formalin Journal Article uri icon

Overview

publication date

  • June 1, 2011

Full Author List

  • Goldstein DN; George SM

Other Profiles

Additional Document Info

start page

  • 5339

end page

  • 5347

volume

  • 519

issue

  • 16