Al3O3 thin film growth on Si(100) using binary reaction sequence chemistry Journal Article uri icon

Overview

publication date

  • January 5, 1997

Full Author List

  • Ott AW; Klaus JW; Johnson JM; George SM

Other Profiles

Additional Document Info

start page

  • 135

end page

  • 144

volume

  • 292

issue

  • 1-2