Al3O3 thin film growth on Si(100) using binary reaction sequence chemistry Journal Article
Overview
publication date
- January 5, 1997
has restriction
- closed
Date in CU Experts
- September 6, 2013 4:39 AM
Full Author List
- Ott AW; Klaus JW; Johnson JM; George SM
author count
- 4
citation count
- 462
published in
- Thin Solid Films Journal
Other Profiles
International Standard Serial Number (ISSN)
- 0040-6090
Digital Object Identifier (DOI)
Additional Document Info
start page
- 135
end page
- 144
volume
- 292
issue
- 1-2