Gas diffusion barriers on polymers using multilayers fabricated by Al2O3 and rapid SiO2 atomic layer deposition Journal Article uri icon

Overview

publication date

  • March 27, 2008

Full Author List

  • Dameron AA; Davidson SD; Burton BB; Carcia PF; McLean RS; George SM

Other Profiles

Additional Document Info

start page

  • 4573

end page

  • 4580

volume

  • 112

issue

  • 12