Mechanism of pyridine-catalyzed SiO2 atomic layer deposition studied by Fourier transform infrared spectroscopy Journal Article uri icon

Overview

publication date

  • January 11, 2007

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Du Y; Du X; George SM

author count

  • 3

citation count

  • 58

Other Profiles

International Standard Serial Number (ISSN)

  • 1932-7447

Electronic International Standard Serial Number (EISSN)

  • 1932-7455

Additional Document Info

start page

  • 219

end page

  • 226

volume

  • 111

issue

  • 1