Mechanism of pyridine-catalyzed SiO2 atomic layer deposition studied by Fourier transform infrared spectroscopy Journal Article uri icon

Overview

publication date

  • January 11, 2007

Full Author List

  • Du Y; Du X; George SM

Other Profiles

Additional Document Info

start page

  • 219

end page

  • 226

volume

  • 111

issue

  • 1