CONTROLLED GROWTH OF SIO2 BY ATOMIC LAYER PROCESSING USING SICL4 AND H2O
Journal Article
Overview
publication date
- March 28, 1993
Date in CU Experts
- September 6, 2013 4:39 AM
Full Author List
- GEORGE SM; WISE ML; COON PA; OKADA LA
author count
- 4
published in
Other Profiles
International Standard Serial Number (ISSN)
- 0065-7727
Additional Document Info
start page
- 165
end page
- COLL
volume
- 205