Properties of ZnO/Al2O3 alloy films grown using atomic layer deposition techniques Journal Article uri icon

Overview

publication date

  • June 1, 2003

Full Author List

  • Elam JW; Routkevitch D; George SM

Other Profiles

Additional Document Info

start page

  • G339

end page

  • G347

volume

  • 150

issue

  • 6