SiO2 chemical vapor deposition at room temperature using SiCl4 and H2O with an NH3 catalyst
Journal Article
Overview
publication date
- July 1, 2000
Full Author List
- Klaus JW; George SM
published in
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 2658
end page
- 2664
volume
- 147
issue
- 7