SiO2 chemical vapor deposition at room temperature using SiCl4 and H2O with an NH3 catalyst Journal Article uri icon

Overview

publication date

  • July 1, 2000

Full Author List

  • Klaus JW; George SM

Other Profiles

Additional Document Info

start page

  • 2658

end page

  • 2664

volume

  • 147

issue

  • 7