SiO2 chemical vapor deposition at room temperature using SiCl4 and H2O with an NH3 catalyst Journal Article uri icon

Overview

publication date

  • July 1, 2000

has restriction

  • bronze

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Klaus JW; George SM

author count

  • 2

citation count

  • 57

Other Profiles

International Standard Serial Number (ISSN)

  • 0013-4651

Additional Document Info

start page

  • 2658

end page

  • 2664

volume

  • 147

issue

  • 7