Thermal Atomic Layer Etching of Nickel Using Sequential Chlorination and Ligand-Addition Reactions Journal Article uri icon

Overview

publication date

  • December 14, 2021

has restriction

  • closed

Date in CU Experts

  • December 17, 2021 11:01 AM

Full Author List

  • Murdzek JA; Lii-Rosales A; George SM

author count

  • 3

citation count

  • 11

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Electronic International Standard Serial Number (EISSN)

  • 1520-5002

Additional Document Info

start page

  • 9174

end page

  • 9183

volume

  • 33

issue

  • 23