Prediction and Validation of the Process Window for Atomic Layer Etching: HF Exposure on TiO2 Journal Article uri icon

Overview

publication date

  • November 12, 2021

Date in CU Experts

  • December 31, 2021 11:47 AM

Full Author List

  • Natarajan SK; Cano AM; Partridge JL; George SM; Elliott SD

author count

  • 5

citation count

  • 1

Other Profiles

International Standard Serial Number (ISSN)

  • 1932-7447

Electronic International Standard Serial Number (EISSN)

  • 1932-7455

Additional Document Info

start page

  • 25589

end page

  • 25599

volume

  • 125

issue

  • 46