Atomic layer etching of ferroelectric hafnium zirconium oxide thin films enables giant tunneling electroresistance Journal Article uri icon

Overview

publication date

  • March 21, 2022

has restriction

  • closed

Date in CU Experts

  • May 7, 2022 4:06 AM

Full Author List

  • Hoffmann M; Murdzek JA; George SM; Slesazeck S; Schroeder U; Mikolajick T

author count

  • 6

Other Profiles

International Standard Serial Number (ISSN)

  • 0003-6951

Electronic International Standard Serial Number (EISSN)

  • 1077-3118

Additional Document Info

volume

  • 120

issue

  • 12

number

  • ARTN 122901