Thermal Atomic Layer Etching of Aluminum Nitride Using HF orXeF2 for Fluorination and BCl3 for Ligand Exchange Journal Article uri icon

Overview

publication date

  • April 28, 2022

has restriction

  • closed

Date in CU Experts

  • June 4, 2022 5:11 AM

Full Author List

  • Cano AM; Lii-Rosales A; George SM

author count

  • 3

citation count

  • 11

Other Profiles

International Standard Serial Number (ISSN)

  • 1932-7447

Electronic International Standard Serial Number (EISSN)

  • 1932-7455

Additional Document Info

start page

  • 6990

end page

  • 6999

volume

  • 126

issue

  • 16