Monitoring atomic layer deposition processes in situ and in real-time by spectroscopic ellipsometry Conference Proceeding uri icon

Overview

publication date

  • September 27, 2011

Date in CU Experts

  • December 7, 2022 1:53 AM

Full Author List

  • Junige M; Geidel M; Knaut M; Albert M; Bartha JW

author count

  • 5

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