Towards shot-noise-limited EUV reflectometry: in a tabletop coherent EUV microscope Conference Proceeding

Overview

CU Boulder Authors

publication date

April 24, 2022

has restriction

closed

Date in CU Experts

February 7, 2023 5:36 AM

Full Author List

Jenkins N; Tanksalvala M; Esashi Y; Kapteyn HC; Murnane MM

Full Editor List

Robinson JC; Sendelbach MJ

author count

5

presented at event

Metrology, Inspection, and Process Control XXXVI Conference

Other Profiles

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.2612098

Additional Document Info

start page

12

end page

12