Towards shot-noise-limited EUV reflectometry: in a tabletop coherent EUV microscope
Conference Proceeding
Overview
publication date
- April 24, 2022
has restriction
- closed
Date in CU Experts
- February 7, 2023 5:36 AM
Full Author List
- Jenkins N; Tanksalvala M; Esashi Y; Kapteyn HC; Murnane MM
Full Editor List
- Robinson JC; Sendelbach MJ
author count
- 5