Robust and reliable actinic ptychographic imaging of highly periodic structures in EUV photomasks Conference Proceeding uri icon


publication date

  • September 26, 2022

has restriction

  • closed

Date in CU Experts

  • February 7, 2023 5:42 AM

Full Author List

  • Wang B; Brooks N; Tanksalvala M; Esashi Y; Jenkins N; Johnsen P; Binnie I; Gui G; Shao Y; Murnane MM

Full Editor List

  • Kasprowicz BS

author count

  • 11

citation count

  • 1

Other Profiles

International Standard Serial Number (ISSN)

  • 0277-786X

Electronic International Standard Serial Number (EISSN)

  • 1996-756X

Additional Document Info


  • 12293