Robust and reliable actinic ptychographic imaging of highly periodic structures in EUV photomasks Conference Proceeding

Overview

CU Boulder Authors

publication date

September 26, 2022

has restriction

closed

Date in CU Experts

February 7, 2023 5:42 AM

Full Author List

Wang B; Brooks N; Tanksalvala M; Esashi Y; Jenkins N; Johnsen P; Binnie I; Gui G; Shao Y; Murnane MM

Full Editor List

Kasprowicz BS

author count

11

citation count

1

published in

Proceedings of SPIE Journal

presented at event

Photomask Technology Conference Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Electronic International Standard Serial Number (EISSN)

1996-756X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.2641726

Additional Document Info

volume

12293