Optimizing amorphous indium zinc oxide film growth for low residual stress and high electrical conductivity Journal Article

Overview

CU Boulder Authors

Berry, Joseph J.

publication date

October 15, 2013

has restriction

closed

Date in CU Experts

March 29, 2023 11:42 AM

Full Author List

Kumar M; Sigdel AK; Gennett T; Berry JJ; Perkins JD; Ginley DS; Packard CE

author count

7

citation count

17

published in

Applied Surface Science Journal

Other Profiles

International Standard Serial Number (ISSN)

0169-4332

Electronic International Standard Serial Number (EISSN)

1873-5584

Digital Object Identifier (DOI)

https://doi.org/10.1016/j.apsusc.2013.06.019

Additional Document Info

start page

65

end page

73

volume

283