publication venue for
- Thermal atomic layer etching of CoO using acetylacetone and ozone: Evidence for changes in oxidation state and crystal structure during sequential exposures 2023
- Effect of applied potential on metal surfaces: Surface energy, Wulff shape and charge distribution 2023
- Smoothing surface roughness using Al2O3 atomic layer deposition 2021
- Atomic layer deposited boron nitride nanoscale films act as high temperature hydrogen barriers 2021
- Atomic layer deposition of tungsten nitride films as protective barriers to hydrogen 2020
- Effect of time and deposition method on quality of phosphonic acid modifier self-assembled monolayers on indium zinc oxide 2016
- Optimizing amorphous indium zinc oxide film growth for low residual stress and high electrical conductivity 2013
- Wafer-scale fabrication of silicon nanowire arrays with controllable dimensions 2012
- TiO2 atomic layer deposition on ZrO2 particles using alternating exposures of TiCl4 and H2O 2004
- Self-assembled monolayers in the context of epitaxial film growth 2001
- H2O and HCl adsorption on single crystal α-Al2O3(0001) at stratospheric temperatures 2001
- Atomic layer deposition of Al2O3 and SiO2 on BN particles using sequential surface reactions 2000
- Atomically controlled growth of tungsten and tungsten nitride using sequential surface reactions 2000
- Adsorption and desorption kinetics of tetrakis(dimethylamino)titanium and dimethylamine on TiN surfaces 1999
- Surface chemistry of In2O3 deposition using In(CH3)(3) and H2O in a binary reaction sequence 1997
- Atomic layer controlled deposition of Al2O3 films using binary reaction sequence chemistry 1996
- The GaAs/GaInP2 heterojunction for studying photoinduced charge transfer processes 1996
- Theory of silicon nanostructures 1996
- ATOMIC LAYER CONTROLLED DEPOSITION OF SIO2 AND AL2O3 USING ABAB - BINARY REACTION SEQUENCE CHEMISTRY 1994
- ISOTHERMAL H-2 DESORPTION-KINETICS FROM SI(100)2X1 - DEPENDENCE ON DISILANE AND ATOMIC-HYDROGEN PRECURSORS 1994